Self Heated Thermo-Resistive Element Hot Wire Anemometer
A microelectromechanical systems (MEMS) hot wire anemometer consisting of thermoresistive elements arranged in a differential bridge configuration is presented. The excitation of the elements to the point of self heating allows for dedicated heating elements to be omitted from the device without compromising operation or accuracy. Overall power consumption gives air velocity, and the temperature […]
CMOS MEMS PRESENT AND FUTURE
The paper reviews the state-of-the-art in the field of CMOS-based microelectromechanical systems (MEMS). The different CMOS MEMS fabrication approaches, preCMOS, intermediate-CMOS, and post-CMOS, are summarized and examples are given. Two microsystems fabricated with post-CMOS micromachining are presented, namely a mass-sensitive chemical sensor for detection of organic volatiles in air and a 10-cantilever force sensor array […]
research papers
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